{"id":75,"date":"2026-02-06T07:46:23","date_gmt":"2026-02-06T07:46:23","guid":{"rendered":"https:\/\/www.jundro.com\/?p=75"},"modified":"2026-06-17T09:26:58","modified_gmt":"2026-06-17T09:26:58","slug":"sic-etch-rings-semiconductor-plasma-etching","status":"publish","type":"post","link":"https:\/\/jundro-ceramics.com\/es\/sic-etch-rings-semiconductor-plasma-etching\/","title":{"rendered":"\u4e3a\u4ec0\u4e48\u78b3\u5316\u7845\u6b63\u5728\u53d6\u4ee3\u6c27\u5316\u94dd\u6210\u4e3a\u534a\u5bfc\u4f53\u8680\u523b\u73af\u7684\u6750\u6599\uff1f"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">\u534a\u5bfc\u4f53\u8bbe\u5907\u5236\u9020\u5546\u6bcf\u5e74\u82b1\u8d39\u6570\u767e\u4e07\u7f8e\u5143\u6765\u63d0\u9ad8\u7b49\u79bb\u5b50\u523b\u8680\u6027\u80fd\uff0c\u4f46\u4e00\u4e2a\u5c0f\u5c0f\u7684\u7ec4\u4ef6\u5374\u80fd\u5f71\u54cd\u8154\u5ba4\u6b63\u5e38\u8fd0\u884c\u65f6\u95f4\u3001\u9897\u7c92\u5c3a\u5bf8\u548c\u6676\u5706\u826f\u7387\u2014\u2014\u90a3\u5c31\u662f\u523b\u8680\u73af\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u9ad8\u7eaf\u6c27\u5316\u94dd\u4e00\u76f4\u662f\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u4e2d\u805a\u7126\u73af\u548c\u8fb9\u7f18\u73af\u7684\u9996\u9009\u6750\u6599\u3002\u7136\u800c\uff0c\u968f\u7740\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\uff0c\u5bf9\u8154\u5ba4\u90e8\u4ef6\u7684\u6027\u80fd\u8981\u6c42\u4e5f\u5728\u9010\u6b65\u63d0\u9ad8\u3002\u5176\u76ee\u6807\u4e0d\u4ec5\u5728\u4e8e\u786e\u4fdd\u8154\u5ba4\u7684\u6b63\u5e38\u8fd0\u884c\uff0c\u8fd8\u5728\u4e8e\u4fdd\u6301\u6700\u5927\u7684\u5c3a\u5bf8\u7a33\u5b9a\u6027\uff0c\u6700\u5927\u200b\u200b\u9650\u5ea6\u5730\u51cf\u5c11\u9897\u7c92\u7269\uff0c\u5e76\u5728\u6574\u4e2a\u5de5\u827a\u8fc7\u7a0b\u4e2d\u7ef4\u6301\u7a33\u5b9a\u7684\u7b49\u79bb\u5b50\u4f53\u6761\u4ef6\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u76ee\u524d\uff0c\u7531\u4e8e\u4ee5\u4e0b\u539f\u56e0\uff0c<a href=\"https:\/\/jundro-ceramics.com\/material\/silicon-carbide-ceramics\/\">\u78b3\u5316\u7845<\/a>\u6b63\u9010\u6e10\u53d6\u4ee3<a href=\"https:\/\/jundro-ceramics.com\/material\/alumina\/\">\u6c27\u5316\u94dd<\/a>\uff0c\u6210\u4e3a\u534a\u5bfc\u4f53\u8680\u523b\u73af\u7684\u9996\u9009\u6750\u6599\u3002<\/p>\n\n\n\n<h2 id=\"composition-and-how-it-s-made\" class=\"wp-block-heading\">\u8fc7\u65e9\u78e8\u635f\u548c\u9897\u7c92\u751f\u6210<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u7531\u4e8e\u805a\u7126\u73af\u5b89\u88c5\u5728\u6676\u5706\u5468\u56f4\u4ee5\u63a7\u5236\u7b49\u79bb\u5b50\u4f53\u5206\u5e03\uff0c\u56e0\u6b64\u5728\u8fd0\u884c\u8fc7\u7a0b\u4e2d\u4f1a\u957f\u65f6\u95f4\u66b4\u9732\u4e8eCF\u2084\u3001NF\u2083\u3001SF\u2086\u3001Cl\u2082\u3001BCl\u2083\u4ee5\u53ca\u5c04\u9891\u7535\u78c1\u573a\u7b49\u73af\u5883\u4e2d\u3002\u8fd9\u79cd\u66b4\u9732\u4f1a\u6301\u7eed\u4fb5\u8680\u8680\u523b\u73af\u7684\u8868\u9762\uff0c\u5bfc\u81f4\u5747\u5300\u6027\u53d8\u5316\u3001\u4f7f\u7528\u5bff\u547d\u7f29\u77ed\u548c\u7ef4\u62a4\u9891\u7387\u589e\u52a0\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u66f4\u6362\u78e8\u635f\u7684\u90e8\u4ef6\u4e0d\u4ec5\u4f1a\u9020\u6210\u6750\u6599\u6210\u672c\uff0c\u800c\u4e14\u6bcf\u6b21\u7ef4\u62a4\u5468\u671f\u90fd\u53ef\u80fd\u5bfc\u81f4\u8bbe\u5907\u505c\u673a\u548c\u751f\u4ea7\u4e2d\u65ad\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u6750\u6599\u5bf9\u6bd4<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u53c2\u6570<\/th><th>\u6c27\u5316\u94dd<\/th><th>\u78b3\u5316\u7845<\/th><\/tr><\/thead><tbody><tr><td>\u5bc6\u5ea6 (g\/cm\u00b3)<\/td><td>3.9<\/td><td>3.1<\/td><\/tr><tr><td>\u70ed\u5bfc\u7387 (W\/m\u00b7K)<\/td><td>30<\/td><td>110<\/td><\/tr><tr><td>Flexural Strength (MPa)<\/td><td>416<\/td><td>450<\/td><\/tr><tr><td>Young&#8217;s Modulus (GPa)<\/td><td>358<\/td><td>430<\/td><\/tr><tr><td>Hardness (GPa)<\/td><td>18<\/td><td>29<\/td><\/tr><tr><td>Wear Resistance<\/td><td>Good<\/td><td>Excellent<\/td><\/tr><tr><td>Particle Resistance<\/td><td>Moderate<\/td><td>Excellent<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">In plasma etching applications, the key difference lies not in electrical properties, but in the combined effects of hardness, thermal conductivity, and resistance to surface degradation. These characteristics directly influence the wear rate of components and the amount of contamination that may occur during use.<\/p>\n\n\n\n<h2 id=\"what-is-lorem-ipsum\" class=\"wp-block-heading\">Four Reasons SiC Has Become a Preferred Etch Ring Material<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">1.SiC has a much higher hardness than aluminum oxide.<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The ultra-high hardness of silicon carbide provides it with superior resistance to surface wear, enabling it to maintain its shape without deformation for a longer period of time.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.Lower risk of particulate pollution<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Silicon carbide can maintain its surface integrity more effectively under harsh processing conditions, and is therefore often used in applications where the primary goal is to reduce particle size.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.Excellent thermal conductivity<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The thermal conductivity of SiC is second only to that of aluminum nitride among these materials and is 3.5 times higher than that of alumina ceramics, enabling it to effectively stabilize component temperatures.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.Extra long service life<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">In our actual processing, many customers have reported that replacing alumina with silicon carbide significantly extends the maintenance cycle of parts.<\/p>\n\n\n\n<h2 id=\"composition-and-how-it-s-made\" class=\"wp-block-heading\">Which Type of Silicon Carbide Is Used in Etch Equipment?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">It is important to understand that not all silicon carbide is the same; even alumina has different purity grades.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Reaction-Bonded Silicon Carbide (RB-SiC)<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Suitable for large parts, with high mechanical strength<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Sintered Silicon Carbide (SSiC)<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Higher density, wear resistance and dimensional stability<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">CVD Silicon Carbide Coatings<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">High-purity silicon carbide with a dense, non-porous surface<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Bulk CVD Silicon Carbide<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Highest purity SiC<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Selecting the Right Material<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">There is no universal material for every plasma-facing component.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Alumina remains a practical choice for many insulating and structural applications.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">However, for focus rings and edge rings that must simultaneously deliver wear resistance, thermal stability, and long service life, silicon carbide is gradually replacing alumina in the market.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Jundro Ceramics provides custom silicon carbide machining services for semiconductor equipment manufacturers, research institutions, and advanced technology companies worldwide. Whether you require prototype development or high-precision production components, our team can support your project with reliable manufacturing solutions and fast technical assistance.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e86\u89e3\u4e3a\u4ec0\u4e48\u78b3\u5316\u7845\u523b\u8680\u73af\u5728\u534a\u5bfc\u4f53\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u4e2d\u5f97\u5230\u8d8a\u6765\u8d8a\u5e7f\u6cdb\u7684\u5e94\u7528\uff0c\u5305\u62ec\u5176\u8010\u78e8\u6027\u3001\u9897\u7c92\u63a7\u5236\u548c\u70ed\u7a33\u5b9a\u6027\u3002<\/p>\n","protected":false},"author":1,"featured_media":728,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"class_list":["post-75","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-10"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - 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